Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating

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	Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating
	Y. H. Zhao; G. Q. Lin; J. Q. Xiao; W. C. Lang; C. A. Dong; J. Gong; C. Sun
	2011
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	257 期号:13 页码:5694-5697
摘要	Thin films of titanium nitride (TiN) were deposited on stainless steel substrates by a modified deposition technique, double-layered shielded arc ion plating with vicarious circular holes (DL-SAIP). The results show that the TiN film with the distance of 10mm between the double-layered shield plates had the least droplets. The deposition rate of the films prepared with the new technique was more homogeneous than that of all the other shielded arc ion plating. The film/substrate adhesion and microhardness values of the TiN films were higher than 40N and 18 GPa, respectively. Thus such TiN thin films can be expected in applications. Crown Copyright (C) 2011 Published by Elsevier B. V. All rights reserved.
部门归属	[zhao, yanhui; xiao, jinquan; lang, wenchang; gong, jun; sun, chao] chinese acad sci, inst met res, shenyang 110016, peoples r china. [lin, guoqiang; dong, chuang] dalian univ technol, minist educ, key lab mat modificat laser ion & electron beams, dalian 116024, peoples r china.;zhao, yh (reprint author), chinese acad sci, inst met res, 72 wenhua rd, shenyang 110016, peoples r china;yhzhao@imr.ac.cn
关键词	Shielded Arc Ion Plating Tin Thin Films Deposition Rate Droplet Particles Adhesion Cathodic Arc Reactive Vacuum
URL	查看原文
WOS记录号	WOS:000288205800037
引用统计	被引频次：15[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/30958
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Y. H. Zhao,G. Q. Lin,J. Q. Xiao,et al. Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating[J]. Applied Surface Science,2011,257(13):5694-5697.
APA	Y. H. Zhao.,G. Q. Lin.,J. Q. Xiao.,W. C. Lang.,C. A. Dong.,...&C. Sun.(2011).Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating.Applied Surface Science,257(13),5694-5697.
MLA	Y. H. Zhao,et al."Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating".Applied Surface Science 257.13(2011):5694-5697.