Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C

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	Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C
	J. J. Li; L. F. Hu; F. Z. Li; M. S. Li; Y. C. Zhou
	2010
发表期刊	Surface & Coatings Technology
ISSN	0257-8972
卷号	204 期号:23 页码:3838-3845
摘要	Cr(2)AlC coating was deposited at 370 and 500 degrees C by D.C. magnetron sputtering from an as-synthesized bulk Cr(2)AlC target. The phase composition and preferential orientation of the coating were investigated using XRD, and the microstructure of the coating was characterized by TEM. Results indicated that Cr(2)AlC coating with a strong (110) preferential orientation could be obtained. The coating microstructure was clearly affected by the deposition temperature. At 370 degrees C, the deposited coating possessed a triple-layered structure with an alpha-(Cr, Al)(2)O(3) inner layer, an amorphous intermediate layer and a crystalline Cr(2)AlC outer layer. However, the coating deposited at 500 degrees C had a single-layered structure consisting of crystalline Cr(2)AlC layer. The growth mechanism of the Cr(2)AlC coating at different deposition temperatures is discussed. (C) 2010 Elsevier B.V. All rights reserved.
部门归属	[li, j. j.; hu, l. f.; li, f. z.; li, m. s.; zhou, y. c.] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. [li, j. j.; hu, l. f.; li, f. z.] chinese acad sci, grad sch, beijing 100039, peoples r china.;li, ms (reprint author), 72 wenhua rd, shenyang 110016, peoples r china;mshli@imr.ac.cn
关键词	Cr(2)Alc Coating Alpha-(Cr Max Phase Al)(2)o(3) Magnetron Sputtering Microstructure Substrate Temperature Phase Thin-films Ab-initio Calculations Select Max Phases Tribological Behavior m(n+1)Ax(n) Phases Deposited Chromium Oxidation Behavior Vapor Deposits Nitride Films Bulk Cr2alc
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文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/31220
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. J. Li,L. F. Hu,F. Z. Li,et al. Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C[J]. Surface & Coatings Technology,2010,204(23):3838-3845.
APA	J. J. Li,L. F. Hu,F. Z. Li,M. S. Li,&Y. C. Zhou.(2010).Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C.Surface & Coatings Technology,204(23),3838-3845.
MLA	J. J. Li,et al."Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C".Surface & Coatings Technology 204.23(2010):3838-3845.