Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

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	Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation
	Z. J. Wang; Z. P. Cao; Y. Otsuka; N. Yoshikawa; H. Kokawa; S. Taniguchi
	2008
发表期刊	Applied Physics Letters
ISSN	0003-6951
卷号	92 期号:22
摘要	Pb(Zr(x)Ti(1-x))O(3) (PZT) thin films were coated on Pt/Ti/SiO(2)/Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 degrees C, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 degrees C. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures. (c) 2008 American Institute of Physics.
部门归属	[wang, z. j.] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. [wang, z. j.; cao, z. p.; otsuka, y.; yoshikawa, n.; kokawa, h.; taniguchi, s.] tohoku univ, grad sch engn, dept mat sci & engn, sendai, miyagi 9808579, japan.;wang, zj (reprint author), chinese acad sci, inst met res, shenyang natl lab mat sci, 72 wenhua rd, shenyang 110016, peoples r china;wangzj@argon.material.tohoku.ac.jp
关键词	Electrical-properties Microstructures Srtio3
URL	查看原文
WOS记录号	WOS:000256527900062
引用统计	被引频次：40[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/33173
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Z. J. Wang,Z. P. Cao,Y. Otsuka,et al. Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation[J]. Applied Physics Letters,2008,92(22).
APA	Z. J. Wang,Z. P. Cao,Y. Otsuka,N. Yoshikawa,H. Kokawa,&S. Taniguchi.(2008).Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation.Applied Physics Letters,92(22).
MLA	Z. J. Wang,et al."Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation".Applied Physics Letters 92.22(2008).