Two-dimensional simulations of temperature fields of the reactor wall during hot-filament CVD diamond film growth over a large area

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	Two-dimensional simulations of temperature fields of the reactor wall during hot-filament CVD diamond film growth over a large area
	A. Y. Wang; C. Sun; H. T. Cao; A. L. Ji; R. F. Huang; L. S. Wen
	2004
发表期刊	Modelling and Simulation in Materials Science and Engineering
ISSN	0965-0393
卷号	12 期号:2 页码:325-335
摘要	In order to study the growth of diamond films over a large area in a traditional hot-filament chemical vapour deposition (HFCVD) reactor, two-dimensional mathematical models were first developed to investigate the temperature fields of the reactor walls, which made significant contributions to thermal round-flow of the reactant gases under different energy transfer systems. The set of partial differential equations involved in the thermal conduction system was solved with different boundary conditions by the finite control volume method. Numerical simulations showed that the temperature space distributions were heterogeneous when thermal radiation was assumed to be the only mechanism in heat transfer from the filaments to the reactor walls. However, taking into account the effects of thermal conduction under adiabatic and different isothermal temperature boundary conditions, the temperature uniformities improved greatly. In addition, thermal convection did not affect the temperature distributions but only increased the total temperature of the reactor wall. These results not only give insight into the dominant reasons resulting in low nucleation density and low growth rate of diamond films, but also provide a basis for the design of industrial HFCVD reactors to obtain high-quality diamond films over a large area.
部门归属	chinese acad sci, inst met res, shenyang 110016, peoples r china.;wang, ay (reprint author), chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Chemical-vapor-deposition Heat-transfer Gas-flow Hfcvd
URL	查看原文
WOS记录号	WOS:000220331400013
引用统计	被引频次：5[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35571
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	A. Y. Wang,C. Sun,H. T. Cao,et al. Two-dimensional simulations of temperature fields of the reactor wall during hot-filament CVD diamond film growth over a large area[J]. Modelling and Simulation in Materials Science and Engineering,2004,12(2):325-335.
APA	A. Y. Wang,C. Sun,H. T. Cao,A. L. Ji,R. F. Huang,&L. S. Wen.(2004).Two-dimensional simulations of temperature fields of the reactor wall during hot-filament CVD diamond film growth over a large area.Modelling and Simulation in Materials Science and Engineering,12(2),325-335.
MLA	A. Y. Wang,et al."Two-dimensional simulations of temperature fields of the reactor wall during hot-filament CVD diamond film growth over a large area".Modelling and Simulation in Materials Science and Engineering 12.2(2004):325-335.