Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating

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	Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating
	Y. S. Zou; W. Wang; G. H. Song; H. Du; J. Gong; R. F. Huang; L. S. Wen
	2004
发表期刊	Materials Letters
ISSN	0167-577X
卷号	58 期号:26 页码:3271-3275
摘要	Diamond-like carbon (DLC) films were prepared on Si (100) substrates under Ar, H-2 and C2H2 gas atmosphere by arc ion plating (AIP). The influence of gas atmosphere on the film microstructure and mechanical properties was studied by Raman spectra, X-ray photoelectron spectra (XPS) and nanoindentation technique. The results show that the film deposited under Ar had the smallest I-D/I-G ratio, the largest sp(3)C content, the maximum hardness of 34.8 GPa and the maximum elastic modulus of 236.9 GPa, compared with those under H-2 and C2H2 gas atmosphere. (C) 2004 Elsevier B.V. All rights reserved.
部门归属	chinese acad sci, inst met res, dept surface engn mat, shenyang 110016, peoples r china. chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china. shenyang univ technol, shenyang 110023, peoples r china.;zou, ys (reprint author), chinese acad sci, inst met res, dept surface engn mat, shenyang 110016, peoples r china;yshzou@imr.ac.cn jgong@imr.ac.cn
关键词	Arc Ion Plating Diamond-like Carbon Films Raman Spectra X-ray Photoelectron Spectra Microstructure Mechanical Properties Amorphous-carbon Deposition Plasma Xps
URL	查看原文
WOS记录号	WOS:000223991000009
引用统计	被引频次：16[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/35782
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	Y. S. Zou,W. Wang,G. H. Song,et al. Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating[J]. Materials Letters,2004,58(26):3271-3275.
APA	Y. S. Zou.,W. Wang.,G. H. Song.,H. Du.,J. Gong.,...&L. S. Wen.(2004).Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating.Materials Letters,58(26),3271-3275.
MLA	Y. S. Zou,et al."Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating".Materials Letters 58.26(2004):3271-3275.