Structure and properties of molybdenum implanted with high-flux carbon ion

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	Structure and properties of molybdenum implanted with high-flux carbon ion
	J. Z. Zhang; Y. Gao; Z. J. Wang; C. Rong
	2003
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	220 期号:1-4 页码:335-342
摘要	High purity molybdenum was implanted by C ion in a metal vapour vacuum arc (MEVVA) implanter. The influence of implantation parameters was studied by varying ion fluence and ion current density. The samples were implanted by 45 keV C ion with fluences from 1 x 10(15) to 1 x 10(18) ions/cm(2), respectively. The as-implanted samples were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), and nanoindenter. Different morphologies were observed on the surfaces of the as-implanted samples due to irradiation damage, and clearly related to implantation parameters. XRD spectra confirm formation of beta-Mo2C with ion fluences equal to or larger than 1 x 10(16) ions/cm(2), and formation of alpha-Mo2C with ion fluence of 1 x 10(18) ions/cm(2). The maximum nanohardness and maximum modulus of the as-implanted samples increased gradually with increasing ion fluence, and reached the corresponding maximum values with ion fluence of 1 x 10(18) ions/cm(2). The experimental results suggest that the structure and properties of the as-implanted Mo samples exhibited strong dependence on implantation parameters. (C) 2003 Elsevier B.V. All rights reserved.
部门归属	tsing hua univ, dept mat sci & engn, beijing 100084, peoples r china. acad sinica, int ctr mat phys, shenyang 110015, peoples r china. china ctr adv sci & technol, beijing 100080, peoples r china.;zhang, jz (reprint author), tsing hua univ, dept mat sci & engn, qinghua garden, beijing 100084, peoples r china
关键词	Molybdenum Carbon Ion implantatIon Nanohardness Mo2c Phase Metals Films Steel
URL	查看原文
WOS记录号	WOS:000187721600041
引用统计	被引频次：5[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/36166
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. Z. Zhang,Y. Gao,Z. J. Wang,et al. Structure and properties of molybdenum implanted with high-flux carbon ion[J]. Applied Surface Science,2003,220(1-4):335-342.
APA	J. Z. Zhang,Y. Gao,Z. J. Wang,&C. Rong.(2003).Structure and properties of molybdenum implanted with high-flux carbon ion.Applied Surface Science,220(1-4),335-342.
MLA	J. Z. Zhang,et al."Structure and properties of molybdenum implanted with high-flux carbon ion".Applied Surface Science 220.1-4(2003):335-342.