Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film

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	Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film
	J. G. Zhu; D. Q. Xiao; W. B. Peng; F. H. Lan; D. R. Wan
	1997
Source Publication	Crystal Research and Technology
ISSN	0232-1300
Volume	32 Issue:3 Pages:449-453
Abstract	Rapid thermal processing (RTP) has developed in fabrication of ferroelectric (FE) thin films be cause it can reduce processing temperature and time. It also improves the properties of FE thin films compatible with semiconductor devices. The thin film samples used were prepared by a multi-ion-beam reactive cosputtering system (MIBRECS) at room temperature. The samples were then subjected to a post-deposition annealing in a RTP system. It was found that PbTiO3 (PT) thin film can grow on amorphous or polycrystalline interfacial layer and the PT thin films annealed by RTP showed the prefered [110] and [100] textures.
description.department	sichuan univ, ctr anal & test, chengdu 610064, peoples r china. acad sinica, int ctr mat phys, shenyang 110015, peoples r china.;zhu, jg (reprint author), sichuan univ, dept mat sci, chengdu 610064, peoples r china
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WOS ID	WOS:A1997XC02700011
Citation statistics	Cited Times:2[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://ir.imr.ac.cn/handle/321006/38246
Collection	中国科学院金属研究所
Recommended Citation GB/T 7714	J. G. Zhu,D. Q. Xiao,W. B. Peng,et al. Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film[J]. Crystal Research and Technology,1997,32(3):449-453.
APA	J. G. Zhu,D. Q. Xiao,W. B. Peng,F. H. Lan,&D. R. Wan.(1997).Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film.Crystal Research and Technology,32(3),449-453.
MLA	J. G. Zhu,et al."Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film".Crystal Research and Technology 32.3(1997):449-453.

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