Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film

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	Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film
	J. G. Zhu; D. Q. Xiao; W. B. Peng; F. H. Lan; D. R. Wan
	1997
发表期刊	Crystal Research and Technology
ISSN	0232-1300
卷号	32 期号:3 页码:449-453
摘要	Rapid thermal processing (RTP) has developed in fabrication of ferroelectric (FE) thin films be cause it can reduce processing temperature and time. It also improves the properties of FE thin films compatible with semiconductor devices. The thin film samples used were prepared by a multi-ion-beam reactive cosputtering system (MIBRECS) at room temperature. The samples were then subjected to a post-deposition annealing in a RTP system. It was found that PbTiO3 (PT) thin film can grow on amorphous or polycrystalline interfacial layer and the PT thin films annealed by RTP showed the prefered [110] and [100] textures.
部门归属	sichuan univ, ctr anal & test, chengdu 610064, peoples r china. acad sinica, int ctr mat phys, shenyang 110015, peoples r china.;zhu, jg (reprint author), sichuan univ, dept mat sci, chengdu 610064, peoples r china
URL	查看原文
WOS记录号	WOS:A1997XC02700011
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/38246
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	J. G. Zhu,D. Q. Xiao,W. B. Peng,et al. Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film[J]. Crystal Research and Technology,1997,32(3):449-453.
APA	J. G. Zhu,D. Q. Xiao,W. B. Peng,F. H. Lan,&D. R. Wan.(1997).Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film.Crystal Research and Technology,32(3),449-453.
MLA	J. G. Zhu,et al."Influence of rapid thermal processing on the orientation properties of PbTiO3 thin film".Crystal Research and Technology 32.3(1997):449-453.