INTERFACIAL REACTIONS IN NI AMORPHOUS-SI MULTILAYERS

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	INTERFACIAL REACTIONS IN NI AMORPHOUS-SI MULTILAYERS
	W. H. Wang; H. Y. Bai; W. K. Wang
	1994
发表期刊	Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing
ISSN	0921-5093
卷号	179 页码:229-233
摘要	Ni/amorphous-Si multilayers (Ni/a-Si) were prepared by ion beam sputtering. The interfacial reactions in Ni/a-Si multilayers were studied by transmission electron microscopy and in situ X-ray diffraction. An amorphous Ni-Si phase (a-(Ni,Si)) is the first phase formed in the Ni and a-Si interfacial reaction. In as-deposited Ni/A-Si multilayers with short modulation period (L = 4.8 nm), the uniform a-(Ni,Si) phase forms at least in the composition range 25-62 at.% Ni, which is consistent with predictions from the calculated Gibbs free energy diagram. The mechanism that controls phase selection in Ni/a-Si interfacial reactions is discussed using nucleation theory. A nucleation controlled model for phase selection is proposed. For polycrystalline Ni and a-Si multilayers with larger modulation period (L = 16.0 nm), amorphization is found to occur both at the Ni-a-Si interfaces, according to planar-layer growth model, and along the Ni crystallite grain boundaries in the Ni sublayer. An amorphous growth model is suggested to explain the amorphization reaction in Ni/a-Si multilayers.
部门归属	acad sinica,int ctr mat phys,beijing 110015,peoples r china.;wang, wh (reprint author), acad sinica,inst phys,beijing 100080,peoples r china
关键词	Amorphous-silicon Phase Selection Films Amorphization Nucleation Model
URL	查看原文
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/38935
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	W. H. Wang,H. Y. Bai,W. K. Wang. INTERFACIAL REACTIONS IN NI AMORPHOUS-SI MULTILAYERS[J]. Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing,1994,179:229-233.
APA	W. H. Wang,H. Y. Bai,&W. K. Wang.(1994).INTERFACIAL REACTIONS IN NI AMORPHOUS-SI MULTILAYERS.Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing,179,229-233.
MLA	W. H. Wang,et al."INTERFACIAL REACTIONS IN NI AMORPHOUS-SI MULTILAYERS".Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing 179(1994):229-233.