一种微塑性成形系统的研制及微成形实验研究

IMR OpenIR

	一种微塑性成形系统的研制及微成形实验研究
	才胜
学位类型	硕士
导师	张士宏 ; 刘越
	2011
学位授予单位	中国科学院金属研究所
学位授予地点	北京
学位专业	材料加工工程
关键词	尺寸效应微成形装置微型模具微压印 Size Effect Microforming Apparatus Miniature Tools Micro Coining Test
摘要	"随着微机电系统等现代化工业的迅速发展，微小型零件的应用日益增多，例如微型螺钉﹑引线框架和各种插头插槽等。虽然目前已经开发出来一些技术，比如LIGA及准LIGA技术﹑深离子反应蚀刻以及微放电加工等，可以制造出高质量且尺寸精确的微型零件，但是现代产业化所要求的高效率﹑批量生产﹑短周期﹑无污染和近净成形等特点制约了这些微加工技术的应用。基于以上背景，微塑性成形技术受到了国内外学者的广泛关注，在近10年内得到了迅速发展。然而，微塑性成形工艺与传统的塑性加工工艺存在着较大差别，并不能将传统成形工艺中的相关技术简单的应用到微成形中来。目前，促进微成形技术的发展所面对的问题主要包括以下三个方面：(1) 微成形材料的选择；(2) 微型模具的开发；(3) 微成形装置的研制。本文开展了微塑性成形设备﹑模具及相关微成形实验的研究。首先研制了一套微塑性成形系统，可以进行微挤压﹑微锻造﹑微冲压和单点步进成形等微成形实验。在此基础上，针对不同的实验方式，设计了三种微型模具，包括微弯曲模具﹑微杯突模具以及微管材扩口模具。最后，以该微成形系统和相关模具为基础，进行了纯铜和非晶合金的微压印实验研究。研制的微塑性成形系统，包括支撑机构﹑传动机构﹑成形机构和电气控制机构。该系统将冲头与拉压传感器相连接，不仅可以进行压缩类试验，还可以进行拉伸类试验。在工作环境方面，利用真空罩使样品台处在一个封闭的环境中，通过对真空罩抽真空或者充入保护气体，使成形过程在真空或者保护气氛中进行。该系统既可以进行冷加工，也可以进行热加工，同时可以实现多种成形方式进行微米级或亚微米级零件的加工，包括微挤压、微锻造、微冲压、微弯曲和单点步进成形等。在微成形系统研制的基础上，设计了三种微型模具，分别适用于微弯曲﹑微杯突和微管材扩口实验。同时，利用设计的微成形模具进行了微压印实验。通过纯铜的微压印实验获得的微型三维形状清晰，表面质量好，表明该系统可以成功地进行微成形实验，从而为微成形规律的研究奠定基础。"
其他摘要	"With the intense development of modern industry including MEMS (Micro-Electro-Mechanical Systems), there have been more and more applications of mini-sized parts, such as miniature bolt, wire lead and various connectors and so on. Although some new technologies such as LIGA or LIGA-like technology, deep reactive ion etching and electrical discharge machining developed recently can manufacture micro components with high quality and precision, there is still a big limitation for their applicatons in modern industry due to the requirements such as high productivity, mass production, environment friendly and near net shape forming. Based on the background above, microforming technology has brought great attention to the researchers in the world and been intensively developed in the late decade. However, due to the big difference between microforming technology and traditional plastic forming methods, we cannot apply the techniques of the traditional forming methods to microforming processes directly. Now, there are three main problems for the development of microforming, which are the materials for microforming process, the miniature tools and microforming apparatus, respectively. In this paper, the research on microforming apparatus, miniature tools and microforming experiments has been conducted. A microforming system has been developed, which can realize different kinds of microforming experiments, such as micro extrusion, micro forging, micro stamping and incremental forming and so on. Based on this microforming system, three miniature tools for microforming are designed, which are appropriate for micro bending test, micro metal-cupping test and micro-tube expanding test, respectively. At last, the coining experiments of copper and bulk metallic glass Zr53.5Ni5Cu26.5Al12Ag3 and micro bending tests of Cu-Al composite material are carried out by means of this microforming apparatus and miniature tools. The apparatus consists of four subsystems. They are support structure subsystem, feed subsystem, shaping subsystem and electrical control subsystem. The punch is connected with a force sensor that can test both tension and pressure. Thus, the apparatus can conduct not only tensile test, but also compression test. To acquire good surface of deformed components, the specimen stage is located inside the evacuated chamber, which makes the forming process is conducted in the vacuum or shielding gas environment. The die can be heated to conduct hot forming or used in cold forming directly. Besides, different kinds of microforming processes such as micro extrusion, micro forging, micro stamping, micro bending and incremental forming can be realized by this apparatus. In addition, three kinds of miniature tools that are fit for micro bending test, micro metal-cupping test and micro-tube expanding test are achieved. Meanwhile, by using the developed microforming system and miniature tools, some coining experiments are carried out. The specimens of copper have great transferability of the shape of the die as well as good surface quality, which means that this apparatus can conduct microforming experiments successfully and be helpful to the further microforming research."
文献类型	学位论文
条目标识符	http://ir.imr.ac.cn/handle/321006/64368
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	才胜. 一种微塑性成形系统的研制及微成形实验研究[D]. 北京. 中国科学院金属研究所,2011.