电弧离子镀钴基合金非晶涂层的制备与性能研究

IMR OpenIR

	电弧离子镀钴基合金非晶涂层的制备与性能研究
	常正凯
学位类型	博士
导师	孙超
	2012
学位授予单位	中国科学院金属研究所
学位授予地点	北京
学位专业	材料加工工程
关键词	电弧离子镀钴合金非晶涂层力学性能磁学性能 Arc Ion Plating Co-based Alloy Amorphous Coatings Mechanical Properties Magnetic Properties
摘要	"钴基非晶涂层具有优异的软磁性能和力学性能，在电力、仪器仪表、传感器、磁屏蔽和能源等领域具有极大的应用潜力。目前广泛使用的制备技术存在着诸如膜层孔隙率高，微观结构难于控制，沉积速率慢，靶材利用率低等一系列问题，必须对磁性非晶涂层沉积技术进行改进。同时，针对具体应用目标，深入研究钴合金非晶涂层的组织结构和相关性能具有重要的意义。本论文采用自行设计的附带冷却循环系统的电弧离子镀技术在1Cr18Ni9Ti不锈钢基体上沉积了钴基合金非晶涂层。利用ANSYS有限元软件模拟靶材在外磁场下的磁力线和磁感应强度矢量的分布，解决了电弧离子镀磁性靶材的“跑弧”问题；利用X射线衍射（XRD）、扫描电镜（SEM）和透射电镜（TEM）等检测手段，分析了涂层的物相结构、表面形貌、元素成分和微观组织；采用全自动显微硬度计和多功能材料表面性能试验仪研究了涂层的力学性能，讨论了组织结构演变对涂层力学性能的影响；采用VSM研究了涂层的磁学性能；研究了不同沉积工艺和参数对涂层大颗粒的影响。利用等离子放电原理解释了电弧离子镀磁性靶材在使用过程中出现的“跑弧”现象，以及由此导致的靶材无法稳定刻蚀的问题。利用有限元方法（FEM）对外加磁场下非磁性靶材系统和磁性靶材系统中的磁场分布进行了模拟。研究了外磁场对电弧斑点运动的影响机理，并结合电弧斑点放电的物理机制，探讨了磁性靶材与低饱和蒸气压金属靶壳、绝缘陶瓷靶壳或软磁性金属靶壳组成复合结构靶材解决磁性靶材使用问题的可行性。实验表明，这三种复合结构靶材设计方案均能有效解决电弧离子镀磁性靶材“跑弧”问题；并发现在低饱和蒸气压金属或绝缘陶瓷靶壳设计方案里，靶材频繁引弧到弧斑能受控运动的转变温度为(136±23) °C。研究了沉积温度、氩气压强和电弧电流的变化对钴基非晶涂层的组织结构、力学性能和磁学性能的影响，并探讨其影响机理。研究结果表明，随沉积温度降低，涂层结晶程度先下降后逐渐升高；粒子团簇尺寸先降低后逐渐恒定。利用形核热力学与晶体生长动力学分析了该结构演化的机理。与此同时，随沉积温度降低，涂层显微硬度和临界载荷先下降后保持恒定，而饱和磁感应强度显示出相反的变化趋势。随氩气压强增加，涂层沉积速率和结晶程度呈现先增大后逐渐减小的规律；涂层显微硬度和临界载荷变化很小。涂层矫顽力随气压增大先迅速增大然后逐渐减小，饱和磁感应强度基本恒定。随电弧电流增加，基体沉积温度先逐渐升高然后小幅降低；涂层沉积速率、显微硬度、临界载荷和矫顽力线性增加；饱和磁感应强度基本恒定，涂层显示出良好的软磁性能。利用自行设计的遮挡自转系统研究了氩气压强、电弧电流和脉冲负偏压对涂层表面颗粒密度和分布的影响。实验表明，自转非连续沉积工艺和双层错位带孔挡板沉积工艺均能有效去除大颗粒，并获得组织均匀、形貌致密的非晶涂层。"
其他摘要	Due to its excellent soft-magnetic properties and mechanical properties, Co-based coatings have significant application expectation in the electric industry, instrument, sensor, magnetic shielding, energy field and so on. At present, there are a lot of problems in the widely used preparation techniques, for example high porosity in the coatings, difficulty to control the microstructure of the coatings, low deposition rate, low rate of the target utilization, and so on. It has to improve the deposition technique for the magnetic amorphous coatings. Aim at specific application, it is significant to study the microstructure and properties of Co-based amorphous coatings. This thesis involved the use of arc ion plating (AIP) with a specimen cooling system to deposit Co-based amorphous alloy coatings onto stainless steel (1Cr18Ni9Ti) substrates. The distribution of the magnetic line of force and the vector of the magnetic flux density of the target under an additional magnetic field were simulated by ANSYS finite element method (FEM) soft. The application of the magnetic target in AIP was solved. Using XRD, SEM (equipped with EDS), and TEM methods, the phase structures, surface morphologies, elemental compositions, and microstructures of the coatings were analyzed. The mechanical properties of the coatings were systematic investigated by Automatic Microindentation Hardness Testing System and scratch tester, and the influence of micro structural evolution on the mechanical properties was discussed. The magnetic properties of the coatings were studied by VSM. The effects of various deposition processes and parameters on the Macro-particles (MPs) of the coatings were also systematically studied. Arc spot outside moving and unstable erosion of the magnetic target in arc ion plating have been investigated by the principle of the plasma discharge. The distribution of the magnetic field of the nonmagnetic target and the magnetic target under an additional magnetic field was simulated by FEM. The effect of magnetic field on the arc spot movement was researched. With the physical mechanism of the arc spot discharge, the feasibility on the solution of the application problem of the magnetic target has been discussed by the program of the composited structure target, which were composed of magnetic target materials and target shell of low saturation vapor pressure metal, target shell of insulating ceramics, or target shell of soft magnetic metal. The results showed that all these solutions could solve the problem of arc spot outside moving efficiently. The chemical compositions of the coatings deposited in three experiment conditions were investigated by EDS, which showed that the coatings were totally composed of the target elements without the elements of the target shells. In the study, the transition temperature is (136±23) °C in the solutions of the target shell of low saturation vapor pressure metal or insulating ceramics, during which the arc striking frequently transformed to the controlled movement of arc spot. We studied the effect of the substrate temperature, Ar pressure, and arc current on the microstructure, mechanical properties, and magnetic properties of the Co-based amorphous coatings. With decreasing substrate temperature, the degree of crystallization firstly decreases and subsequently increases, and the cluster size firstly decreases and then remains constant. The effect of substrate temperature on the evolution of the structure has been studied as a result of a competition between nucleation thermodynamics and kinetics of crystalline growth. With decreasing the substrate temperature, the microhardness and the critical load of the coatings firstly increased, and then remained almost constant. The saturation magnetization revealed the opposite trend over the same range. With the increase of Ar pressure, deposition rate, coercive force, and the degree of crystallization firstly increased and then decreased gradually, and microhardness, critical load, and saturation magnetization of the coatings changed little. With the increase of arc current, the substrate temperature firstly increased gradually and then decreased slightly; deposition rate, microhardness, critical load, and coercive force increased linearly; the saturation magnetization remained constant; and the coatings showed excellent soft-magnetic properties. The effects of Ar pressure, arc current, and pulse bias on the MPs of the coatings were studied by a rotation-shielding system. In the study, the MPs were wiped off effectively by the incontinuous deposition process of the samples rotation and the deposition process of the double dislocation baffle, and the uniform and dense amorphous coatings was prepared."
文献类型	学位论文
条目标识符	http://ir.imr.ac.cn/handle/321006/64493
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	常正凯. 电弧离子镀钴基合金非晶涂层的制备与性能研究[D]. 北京. 中国科学院金属研究所,2012.