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有机硅烷激光气相合成硅基超细粉
梁勇, 李亚利, 郑丰, 肖克沈 and 线全刚
1996-01-24
Rights Holder中国科学院金属研究所
Date Available1996-01-24
Country中国
Subtype发明专利
Abstract一种激光气相合成硅基超细粉的方法,其特征在于:以有机硅烷为主体反应物,以氢和/或氨为附加反应气,在下述工艺条件下:激光功率密度(P):500~6000W/cm2,反应压力(Pe):0.2~1atm,反应总气流量(Φt):1200~6000cm3/min,反应时间(t):0.2~4ms,反应温度(T):600~1800℃,合成硅基超细粉。用该方法可大幅度降低成本,高质量地合成硅基超细粉。
Language中文
Status公开
Application NumberCN1115301
Document Type专利
Identifierhttp://ir.imr.ac.cn/handle/321006/67959
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
梁勇, 李亚利, 郑丰, 肖克沈 and 线全刚. 有机硅烷激光气相合成硅基超细粉[P]. 1996-01-24.
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