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磁控溅射Fe-N薄膜的微结构研究
詹倩; 贺连龙; 李斗星
2002-08-19
Conference Name第十二届全国电子显微学会议
Source Publication电子显微学报第21卷第5期
Conference Date2002-08-19
Conference Place太原
Publication Place北京
Publisher《电子显微学报》编辑部
Abstract本文采用反应射频磁控溅射沉积技术合成Fe-N薄膜,并利用电镜观察研究其微观结构,为进一步优化性能提供依据.
description.department中国科学院金属研究所沈阳材料科学国家(联合)实验室(辽宁沈阳)
Keyword磁头材料 磁控溅射 Fe-n薄膜 薄膜微结构 电镜观察
Funding Organization中国物理学会
Language中文
Document Type会议论文
Identifierhttp://ir.imr.ac.cn/handle/321006/70035
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
詹倩,贺连龙,李斗星. 磁控溅射Fe-N薄膜的微结构研究[C]. 北京:《电子显微学报》编辑部,2002.
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