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电弧离子镀沉积Al-O-N高温扩散阻挡层的研究
王启民; 武颖娜; 柯培玲; 孙超; 黄荣芳; 闻立时
2003-09-01
Conference Name第十届全国高温合金年会
Source Publication钢铁研究学报2003第7期
Conference Date2003-09-01
Conference Place北京
Publication Place北京
Publisher《钢铁研究学报》编辑部
Abstract采用电弧离子镀技术在DSM11合金与NiCoCrAlY涂层间沉积Al-O-N高温扩散阻挡层薄膜,研究了不同O<,2>、N<,2>流量对Al-O-N薄膜相结构的影响及高温下Al-O-N薄膜阻挡合金元素互扩散的行为.实验结果表明,电弧离子膜法沉积的Al-O-N薄膜为多晶膜,具有α-Al<,2>O<,3>+六方AlN的相结构,随着N<,2>的增加,AlN相的含量增加.在1050℃下氧化100h后,Al-O-N层能有效阻挡DSM11合金中的Ti元素向外扩散,扩散阻挡层对涂层的氧化动力学影响不大.
description.department中国科学院金属研究所金属腐蚀与防护国家重点实验室(辽宁沈阳)
Keyword扩散阻挡层 电弧离子镀 Dsm11合金 Nicocraly涂层 Al-o-n薄膜
Funding Organization中国金属学会
Language中文
Document Type会议论文
Identifierhttp://ir.imr.ac.cn/handle/321006/70138
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
王启民,武颖娜,柯培玲,等. 电弧离子镀沉积Al-O-N高温扩散阻挡层的研究[C]. 北京:《钢铁研究学报》编辑部,2003.
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