Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film

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	Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film
	X. H. Guo; K. Q. Du; H. Ge; Q. Z. Guo; Y. Wang; F. H. Wang
	2013
发表期刊	Electrochemistry Communications
ISSN	1388-2481
卷号	28 页码:95-99
摘要	Humidity sensor based on thin micro-arc oxidation alumina (MOA) film was fabricated by a transient self-feedback control (TSFC) technique for the first time. The MOA film consisted of a polycrystalline nature of alpha and gamma-Al2O3 phases, while high surface/volume ratio led to remarkable adsorption of the MOA film. Moreover, the humidity performance of the MOA sensor indicated good sensitivity of 8045.55 at 98% RH. Fast response and recovery times of the MOA sensor were 90 s and 30 s, respectively, at 20 degrees C and 1000 Hz. Exposing the MOA sensor to different humidities for longer durations indicated an excellent stability due to the alpha-Al2O3 phase in the MOA film. The mechanism in the sensor, to humidity, was explained by using equivalent circuits of (RC) and (C(RZ)). In the low RH range, the process was mainly dominated by the migration of protons through the adsorbed water molecule layer on the surface of the MOA film; while, in the high RH range, the process was due to the faster diffusion of protons in the single or multiple layers that were formed on the materials surface. (C) 2012 Elsevier B.V. All rights reserved.
部门归属	[guo, xinghua ; du, keqin ; guo, quanzhong ; wang, yong ; wang, fuhui] chinese acad sci, state key lab corros & protect, inst met res, shenyang 110016, peoples r china. [ge, hao] liaoning univ, liaoning key lab green synth & preparat chem adv, coll chem, shenyang 110036, peoples r china. ; du, kq (reprint author), chinese acad sci, state key lab corros & protect, inst met res, shenyang 110016, peoples r china. ; kqdu@imr.ac.cn
关键词	Humidity Sensor Sensitivity Stability Micro-arc Oxidation Al2o3 Thin-films Al2o3 Anodization
URL	查看原文
语种	英语
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/71235
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	X. H. Guo,K. Q. Du,H. Ge,et al. Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film[J]. Electrochemistry Communications,2013,28:95-99.
APA	X. H. Guo,K. Q. Du,H. Ge,Q. Z. Guo,Y. Wang,&F. H. Wang.(2013).Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film.Electrochemistry Communications,28,95-99.
MLA	X. H. Guo,et al."Good sensitivity and high stability of humidity sensor using micro-arc oxidation alumina film".Electrochemistry Communications 28(2013):95-99.