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Effect of heating rates on the crystallization process of (111)-oriented lead zirconate titanate thin films prepared by the sol-gel method
Han, H. J.; Chen, Y. N.; Wang, Z. J.; wangzj@imr.ac.cn
2015
发表期刊CERAMICS INTERNATIONAL
ISSN0272-8842
卷号41期号:10页码:15208-15216
摘要We prepared Pb(Zr0.52Ti0.48)O-3 (PZT) thin films with a (111)-preferred orientation on Pt/Ti/SiO2/Si substrates by a sol-gel method, and investigated the effects of heating rates on the crystallization process and kinetics by X-ray diffraction, transmission electron microscopy and Avrami's model. We found that the (111)-orientated initial crystallites directly formed on the top of Pt in the early stage of crystallization, and had smaller lattice parameters and an enhanced Ti content than the standard perovskite PZT. The quantity and distribution of the initial crystallites were dependent on the heating rates. The initial crystallite acted as a nucleation site for the perovskite PZT, which grew with a columnar grain structure into the pyrochlore matrix throughout the film. Using Avrami's model, we found that the effective activation energy for crystallization of the PZT films heated at a fast heating rate of 35 degrees C/s to be 241 kJ/mol, much lower than 325 kJ/mol for crystallization of the PZT films heated at a low heating rate of 25 degrees C/min. These results show that a fast heating rate in annealing process can reduce the effective activation energy for crystallization, improve the microstructure including the crystalline orientation, grain size and shape and thus the electrical properties of PZT thin films. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
部门归属[han, h. j. ; chen, y. n. ; wang, z. j.] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china
关键词Lead Zirconate Titanate (Pzt) Sol-gel Heating Rate Crystallization Kinetics
资助者Hundred Talents Program of Chinese Academy of Sciences; National Natural Science Foundation of China [51172238]
收录类别sci
语种英语
WOS记录号WOS:000362919900167
引用统计
被引频次:12[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/74753
专题中国科学院金属研究所
通讯作者wangzj@imr.ac.cn
推荐引用方式
GB/T 7714
Han, H. J.,Chen, Y. N.,Wang, Z. J.,et al. Effect of heating rates on the crystallization process of (111)-oriented lead zirconate titanate thin films prepared by the sol-gel method[J]. CERAMICS INTERNATIONAL,2015,41(10):15208-15216.
APA Han, H. J.,Chen, Y. N.,Wang, Z. J.,&wangzj@imr.ac.cn.(2015).Effect of heating rates on the crystallization process of (111)-oriented lead zirconate titanate thin films prepared by the sol-gel method.CERAMICS INTERNATIONAL,41(10),15208-15216.
MLA Han, H. J.,et al."Effect of heating rates on the crystallization process of (111)-oriented lead zirconate titanate thin films prepared by the sol-gel method".CERAMICS INTERNATIONAL 41.10(2015):15208-15216.
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