Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films

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	Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films
	Hamaguchi, D; Kobayashi, S; Uchida, T; Sawada, Y; Lei, H; Hoshi, Y; Hoshi, Y (reprint author), Tokyo Polytech Univ, Atsugi, Kanagawa 2430213, Japan.
	2016-10-01
发表期刊	JAPANESE JOURNAL OF APPLIED PHYSICS
ISSN	0021-4922
卷号	55 期号:10
摘要	In this study, we investigated the degradation mechanisms of the luminance performance of organic light-emitting diodes (OLEDs) when their top electrode films were deposited by sputter deposition process. During the sputter deposition of the top electrode films, the suppression of the incidence of high-energy electrons on the substrate was attempted using various methods. As a result, we found that during electrode deposition, the incidence of the high-energy secondary electrons, which were emitted from the target surface, on the substrate was the main cause of the significant degradation of the luminance performance. It was also found that the application of a magnetic field by setting permanent magnets near the substrate holder and the insertion of a shield plate near the target cathode were effective in suppressing the incidence of secondary electrons on the substrate. (C) 2016 The Japan Society of Applied Physics
部门归属	[hamaguchi, daichi ; kobayashi, shin-ichi ; uchida, takayuki ; sawada, yutaka ; hoshi, yoichi] tokyo polytech univ, atsugi, kanagawa 2430213, japan ; [lei, hao] chinese acad sci, inst met res, shenyang 110016, peoples r china
学科领域	Physics, Applied
资助者	Ministry of Education, Culture, Sports, Science and Technology of Japan [15K04682]
收录类别	sci
语种	英语
WOS记录号	WOS:000384091600001
引用统计	被引频次：7[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/76253
专题	中国科学院金属研究所
通讯作者	Hoshi, Y (reprint author), Tokyo Polytech Univ, Atsugi, Kanagawa 2430213, Japan.
推荐引用方式 GB/T 7714	Hamaguchi, D,Kobayashi, S,Uchida, T,et al. Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2016,55(10).
APA	Hamaguchi, D.,Kobayashi, S.,Uchida, T.,Sawada, Y.,Lei, H.,...&Hoshi, Y .(2016).Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films.JAPANESE JOURNAL OF APPLIED PHYSICS,55(10).
MLA	Hamaguchi, D,et al."Improvement in luminance efficiency of organic light emitting diodes by suppression of secondary electron bombardment of substrate during sputter deposition of top electrode films".JAPANESE JOURNAL OF APPLIED PHYSICS 55.10(2016).