| Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers |
| Du, XM; Wang, MP; Wang, Y; Li, XX; Zhang, Z; Zhang, G; Huang, CQ; Wu, ED; Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
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| 2016-09-01
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| 发表期刊 | SURFACE AND INTERFACE ANALYSIS
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| ISSN | 0142-2421
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| 卷号 | 48期号:9页码:1012-1016 |
| 摘要 | Alternate CrAlN/TiAlNmultilayerswith different repeated bilayer thickness ranging from10 to 20nmwere prepared by sputtering Ti, Al and Cr targets with N-2 and Ar gases. The interface structures of multilayers such as the average individual thicknesses, the scattering length densities and interface roughness were characterized using nonpolarized specular neutron reflectometry. The experimental reflectivity can be well described by a multilayer model for all samples. The individual thickness in the repeated bilayers is close to the nominal thickness. The interface roughness diminishes as the thickness of the bilayer in mutilayers decreases. The asymmetric interface roughness on CrAlN-TiAlN-Si interfaces causes the larger interface roughness of CrAlN on TiAlN interface. The scattering length density profiles of multilayers suggest that the chemical composition is approximate to Cr0.86Al0.14N/Ti0.5Al0.5N and which is more accurate for thinner films. Copyright (C) 2016 John Wiley & Sons, Ltd. |
| 部门归属 | [du, xiaoming
; wang, minpeng
; zhang, gang] shenyang ligong univ, sch mat sci & engn, shenyang 110159, peoples r china
; [wang, yan
; li, xinxi
; huang, chaoqiang] china acad engn phys, inst nucl phys & chem, mianyang 621900, peoples r china
; [zhang, zhong] tongji univ, inst precis opt engn, shanghai 200092, peoples r china
; [wu, erdong] chinese acad sci, inst met res, shenyang 110016, peoples r china
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| 关键词 | Craln/tialn Multilayer
Neutron Reflectometry
Interface Structure
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| 学科领域 | Chemistry, Physical
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| 资助者 | NPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) [2014BB05]
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| 收录类别 | sci
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| 语种 | 英语
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| WOS记录号 | WOS:000383755600009
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| 引用统计 |
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| 文献类型 | 期刊论文
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| 条目标识符 | http://ir.imr.ac.cn/handle/321006/76287
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| 专题 | 中国科学院金属研究所
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| 通讯作者 | Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China. |
推荐引用方式
GB/T 7714 |
Du, XM,Wang, MP,Wang, Y,et al. Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers[J]. SURFACE AND INTERFACE ANALYSIS,2016,48(9):1012-1016.
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| APA |
Du, XM.,Wang, MP.,Wang, Y.,Li, XX.,Zhang, Z.,...&Du, XM .(2016).Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers.SURFACE AND INTERFACE ANALYSIS,48(9),1012-1016.
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| MLA |
Du, XM,et al."Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers".SURFACE AND INTERFACE ANALYSIS 48.9(2016):1012-1016.
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