NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS

IMR OpenIR

	NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS
	Du, X. M.; Zheng, K. F.; Wang, Y.; Li, X. X.; Wang, M. P.; Zhang, G.; Wu, E. D.; Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
	2017
发表期刊	DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES
ISSN	1842-3582
卷号	12 期号:2 页码:265-272
摘要	Neutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.; Neutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.
部门归属	[du, x. m. ; zheng, k. f. ; wang, m. p. ; zhang, g.] shenyang ligong univ, sch mat sci & engn, shenyang 110159, peoples r china ; [wang, y. ; li, x. x.] china acad engn phys, inst nucl phys & chem, mianyang 621900, peoples r china ; [wu, e. d.] chinese acad sci, inst met res, shenyang 110016, peoples r china
关键词	Hard Multilayer Neutron And X-ray Reflectometry Interfacial Structures
学科领域	Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
资助者	NPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) [2014BB05]; Research Foundation of Education Bureau of Liaoning Province, China [LG201620]
收录类别	SCI
语种	英语
WOS记录号	WOS:000402649700004
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/77921
专题	中国科学院金属研究所
通讯作者	Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
推荐引用方式 GB/T 7714	Du, X. M.,Zheng, K. F.,Wang, Y.,et al. NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS[J]. DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,2017,12(2):265-272.
APA	Du, X. M..,Zheng, K. F..,Wang, Y..,Li, X. X..,Wang, M. P..,...&Du, XM .(2017).NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS.DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,12(2),265-272.
MLA	Du, X. M.,et al."NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS".DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES 12.2(2017):265-272.