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一种旋转横向磁场耦合轴向磁场辅助电弧离子镀装置
赵彦辉、肖金泉、于宝海
2016-03-30
Rights Holder赵彦辉、肖金泉、于宝海
Date Available2016-03-30
Country中国
Subtype发明
Abstract一种旋转横向磁场耦合轴向磁场辅助电弧离子镀装置
description.department中国科学院金属研究所
Application Date2013-11-28
Language中文
Application Number201310632153.3
Document Type专利
Identifierhttp://ir.imr.ac.cn/handle/321006/78750
Collection中国科学院金属研究所
Recommended Citation
GB/T 7714
赵彦辉、肖金泉、于宝海. 一种旋转横向磁场耦合轴向磁场辅助电弧离子镀装置[P]. 2016-03-30.
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