Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films

IMR OpenIR

	Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films
	Han, Ke-Chang; Lin, Guo-Qiang; Dong, Chuang; Tai, Kai-Ping; Jiang, Xin; Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
	2017-11-01
发表期刊	CHINESE ACAD SCIENCES, INST METAL RESEARCH
ISSN	1006-7191
卷号	30 期号:11 页码:1100-1108
摘要	To study the influence of the nitrogen vacancy (V-N) on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different V-N concentrations were synthesized on the Si (111) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a V-N concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different V-N concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in V-N concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of V-N concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress.; To study the influence of the nitrogen vacancy (V-N) on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different V-N concentrations were synthesized on the Si (111) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a V-N concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different V-N concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in V-N concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of V-N concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress.
部门归属	[han, ke-chang ; lin, guo-qiang ; dong, chuang] dalian univ technol, minist educ, key lab mat modificat laser ion & electron beams, dalian 116024, peoples r china ; [tai, kai-ping ; jiang, xin] chinese acad sci, inst met res, shenyang 110016, liaoning, peoples r china
关键词	Zrnx Films Nitrogen Vacancy Hardness Electrical Properties Band Structure
学科领域	Metallurgy & Metallurgical Engineering
资助者	National Natural Science Foundation of China [51271047]
收录类别	SCI
语种	英语
WOS记录号	WOS:000414265700008
引用统计	被引频次：13[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/79014
专题	中国科学院金属研究所
通讯作者	Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Han, Ke-Chang,Lin, Guo-Qiang,Dong, Chuang,et al. Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films[J]. CHINESE ACAD SCIENCES, INST METAL RESEARCH,2017,30(11):1100-1108.
APA	Han, Ke-Chang,Lin, Guo-Qiang,Dong, Chuang,Tai, Kai-Ping,Jiang, Xin,&Lin, GQ .(2017).Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films.CHINESE ACAD SCIENCES, INST METAL RESEARCH,30(11),1100-1108.
MLA	Han, Ke-Chang,et al."Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films".CHINESE ACAD SCIENCES, INST METAL RESEARCH 30.11(2017):1100-1108.