Effect of the Structure and Component on Refractive Index of TiO2 Film

IMR OpenIR

	Effect of the Structure and Component on Refractive Index of TiO2 Film
	Liu Chengshi 1,2; Wu Dengxue 1,2; Zhao Lili 1,2; Liao Zhijun 1,2; Lu Tiecheng 1,2,3
通讯作者	Wu Dengxue(wudengxue@scu.edu.cn)
	2009-12-01
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	38 页码:575-578
摘要	In this work TiO2 films were prepared on silicon substrates by electron beam evaporation, and the refractive index of the films deposited at different temperature, were measured by ellipsometry. The results revealed that the refractive index was improved as increasing the deposition temperature. The structure and composition were characterized by XRD, XPS and FI-IR respectively. The XRD confirmed that the improvement of the refractive index is result from the improvement of the crystallization. And the XPS and Fi-IR confirmed that the refractive index is lower than that of bulk TiO2 due to the presence of non-stoichiometry of TiO(2-x) and SiO(2-x).
关键词	TiO2 film refractive index electron beam evaporation
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000208192600153
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/96415
专题	中国科学院金属研究所
通讯作者	Wu Dengxue
作者单位	1.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China 2.Sichuan Univ, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China 3.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China
推荐引用方式 GB/T 7714	Liu Chengshi,Wu Dengxue,Zhao Lili,et al. Effect of the Structure and Component on Refractive Index of TiO2 Film[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38:575-578.
APA	Liu Chengshi,Wu Dengxue,Zhao Lili,Liao Zhijun,&Lu Tiecheng.(2009).Effect of the Structure and Component on Refractive Index of TiO2 Film.RARE METAL MATERIALS AND ENGINEERING,38,575-578.
MLA	Liu Chengshi,et al."Effect of the Structure and Component on Refractive Index of TiO2 Film".RARE METAL MATERIALS AND ENGINEERING 38(2009):575-578.