Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering

IMR OpenIR

	Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering
	Liao Guojin 1; Luo Hong 2; Yan Shaofeng ; Ba Dechun 3; Wen Lishi 4
通讯作者	Liao Guojin(liaoguojin@163.com)
	2009-04-01
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	38 期号:4 页码:700-704
摘要	Aluminum oxide films doped with Ce were prepared by the medium frequency reactive magnetron sputtering technique. Ce3+ content, the composition and the crystalline structure of the films were characterized by EDS, XRD and AES. The results show that the photoluminescence emission of these films shows peaks at the range of 374 similar to 405 nm which are associated with 5d to 4f transitions of Ce. The relative intensities of these peaks are strongly dependent on the amount of Ce incorporated in the films, and the substrate temperature during deposition. It is proposed that the light emission observed is generated by the luminescent center associated with cerium chloride molecular rather than the doped cerium ions (Ce3+). With the increase of Ce concentration, the photoluminescence peaks shift to lower energy, it would be associated with the existence of element chrorine in the films.
关键词	photoluminescence Al2O3 thin films magnetron sputtering CeCl3
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000266079800030
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/96566
专题	中国科学院金属研究所
通讯作者	Liao Guojin
作者单位	1.Liaoning Univ Technol, Sch Mech Engn & Automat, Jinzhou 121001, Peoples R China 2.Petro China NE Refining & Chem Engn Co Ltd, Jinzhou Design Inst, Jinzhou 121001, Peoples R China 3.Northeastern Univ, Shenyang 110004, Peoples R China 4.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Liao Guojin,Luo Hong,Yan Shaofeng,et al. Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38(4):700-704.
APA	Liao Guojin,Luo Hong,Yan Shaofeng,Ba Dechun,&Wen Lishi.(2009).Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering.RARE METAL MATERIALS AND ENGINEERING,38(4),700-704.
MLA	Liao Guojin,et al."Photoluminescence of Al2O3:CeCl3 Films by Medium Frequency Reactive Magnetron Sputtering".RARE METAL MATERIALS AND ENGINEERING 38.4(2009):700-704.