Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets

doi:10.1088/0022-3727/42/18/185408

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	Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets
	Sigumonrong, Darwin P.1; Zhang, Jie 2,3; Zhou, Yanchun 2; Music, Denis 1; Schneider, Jochen M.1
通讯作者	Sigumonrong, Darwin P.()
	2009-09-21
发表期刊	JOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN	0022-3727
卷号	42 期号:18 页码:8
摘要	The influence of deposition temperature on phase formation of V2AlC is studied by magnetron sputtering from elemental targets. At substrate temperatures below 750 degrees C, we observed the formation of AlxVy and V2C using x-ray diffraction (XRD) analysis. At 750 degrees C, a phase pure polycrystalline V2AlC film on a similar to 12 nm thick transition layer has been observed using XRD and transmission electron microscopy. Selected area electron diffraction indicates that the film grown on the transition layer consists of phase pure V2AlC. As the substrate temperature is increased to 850 degrees C, the formation of V2C in addition to the V2AlC phase is observed. This may be due to desorption of aluminium causing the decomposition of V2AlC into vanadium carbides and aluminium. The V2AlC film is fully dense and polycrystalline and the elastic modulus based on nanoindentation is within the expected error margin consistent with previously reported theoretical calculations and the diamond anvil cell measurement of bulk V2AlC samples.
资助者	Deutsche Forschungsgemeinschaft (DFG)
DOI	10.1088/0022-3727/42/18/185408
收录类别	SCI
语种	英语
资助项目	Deutsche Forschungsgemeinschaft (DFG)[561]
WOS研究方向	Physics
WOS类目	Physics, Applied
WOS记录号	WOS:000269557000051
出版者	IOP PUBLISHING LTD
引用统计	被引频次：28[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/97048
专题	中国科学院金属研究所
通讯作者	Sigumonrong, Darwin P.
作者单位	1.Rhein Westfal TH Aachen, D-52074 Aachen, Germany 2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat, Shenyang 110016, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Sigumonrong, Darwin P.,Zhang, Jie,Zhou, Yanchun,et al. Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2009,42(18):8.
APA	Sigumonrong, Darwin P.,Zhang, Jie,Zhou, Yanchun,Music, Denis,&Schneider, Jochen M..(2009).Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets.JOURNAL OF PHYSICS D-APPLIED PHYSICS,42(18),8.
MLA	Sigumonrong, Darwin P.,et al."Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets".JOURNAL OF PHYSICS D-APPLIED PHYSICS 42.18(2009):8.