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Preparation and Characterization of Boron Carbide Nitrogen Thin Films
Liu Zhenliang1; Liao Zhijun1; Fan Qiang1; Yang Shuichang1; Wu Dengxue1; Lu Tiecheng1,2
Corresponding AuthorLiao Zhijun()
2009-12-01
Source PublicationRARE METAL MATERIALS AND ENGINEERING
ISSN1002-185X
Volume38Pages:568-571
AbstractIn this paper, Boron carbon nitride thin films were deposited on Si (100) substrates using electron beam evaporation technology. The thickness was ascertained by Ellipsometer; meantime the films samples were characterized by X-ray diffraction(XRD) Fourier-transformed infrared spectroscopy and X-ray photon electron spectroscopy(XPS). The result of Ellipsometer shows that the films are even and the deposition rate is slow. The results of X-ray diffraction show the film are crystal state. At the same time the results of X-ray photon electron spectroscopy (XPS) and Fourier-transformed infrared spectroscopy show the films are atomic-level hybrids composed of B, C and N atoms.
Keywordboron carbon nitride thin films X-ray diffraction (XRD) X-ray photon electron spectroscopy (XPS) fourier-transformed infrared spectroscopy (FTIR)
Indexed BySCI
Language英语
WOS Research AreaMaterials Science ; Metallurgy & Metallurgical Engineering
WOS SubjectMaterials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS IDWOS:000208192600151
PublisherNORTHWEST INST NONFERROUS METAL RESEARCH
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/99318
Collection中国科学院金属研究所
Corresponding AuthorLiao Zhijun
Affiliation1.Sichuan Univ, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China
2.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China
Recommended Citation
GB/T 7714
Liu Zhenliang,Liao Zhijun,Fan Qiang,et al. Preparation and Characterization of Boron Carbide Nitrogen Thin Films[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38:568-571.
APA Liu Zhenliang,Liao Zhijun,Fan Qiang,Yang Shuichang,Wu Dengxue,&Lu Tiecheng.(2009).Preparation and Characterization of Boron Carbide Nitrogen Thin Films.RARE METAL MATERIALS AND ENGINEERING,38,568-571.
MLA Liu Zhenliang,et al."Preparation and Characterization of Boron Carbide Nitrogen Thin Films".RARE METAL MATERIALS AND ENGINEERING 38(2009):568-571.
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