Preparation and Characterization of Boron Carbide Nitrogen Thin Films

IMR OpenIR

	Preparation and Characterization of Boron Carbide Nitrogen Thin Films
	Liu Zhenliang 1; Liao Zhijun 1; Fan Qiang 1; Yang Shuichang 1; Wu Dengxue 1; Lu Tiecheng 1,2
通讯作者	Liao Zhijun()
	2009-12-01
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	38 页码:568-571
摘要	In this paper, Boron carbon nitride thin films were deposited on Si (100) substrates using electron beam evaporation technology. The thickness was ascertained by Ellipsometer; meantime the films samples were characterized by X-ray diffraction(XRD) Fourier-transformed infrared spectroscopy and X-ray photon electron spectroscopy(XPS). The result of Ellipsometer shows that the films are even and the deposition rate is slow. The results of X-ray diffraction show the film are crystal state. At the same time the results of X-ray photon electron spectroscopy (XPS) and Fourier-transformed infrared spectroscopy show the films are atomic-level hybrids composed of B, C and N atoms.
关键词	boron carbon nitride thin films X-ray diffraction (XRD) X-ray photon electron spectroscopy (XPS) fourier-transformed infrared spectroscopy (FTIR)
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000208192600151
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/99318
专题	中国科学院金属研究所
通讯作者	Liao Zhijun
作者单位	1.Sichuan Univ, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China
推荐引用方式 GB/T 7714	Liu Zhenliang,Liao Zhijun,Fan Qiang,et al. Preparation and Characterization of Boron Carbide Nitrogen Thin Films[J]. RARE METAL MATERIALS AND ENGINEERING,2009,38:568-571.
APA	Liu Zhenliang,Liao Zhijun,Fan Qiang,Yang Shuichang,Wu Dengxue,&Lu Tiecheng.(2009).Preparation and Characterization of Boron Carbide Nitrogen Thin Films.RARE METAL MATERIALS AND ENGINEERING,38,568-571.
MLA	Liu Zhenliang,et al."Preparation and Characterization of Boron Carbide Nitrogen Thin Films".RARE METAL MATERIALS AND ENGINEERING 38(2009):568-571.