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Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses 期刊论文
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2025, 卷号: 216, 页码: 241-259
作者:  Wang, Yuhang;  Zhao, Yang;  Wang, Shaogang;  Chen, Ji;  Zhang, Tao;  Wang, Fuhui
收藏  |  浏览/下载：3/0  |  提交时间：2025/04/27
Semiconductor  Thermodynamic calculations  Anodized aluminum  Sealing method  Design principle  
Effects of three sealing methods of aluminum phosphate sealant on corrosion resistance of the Fe-based amorphous coating 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2017, 卷号: 309, 页码: 579-589
作者:  Liu, M. M.;  Hu, H. X.;  Zheng, Y. G.;  Hu, HX (reprint author), Chinese Acad Sci, Inst Met Res, CAS Key Lab Nucl Mat & Safety Assessment, 62 Wencui Rd, Shenyang 110016, Peoples R China.
收藏  |  浏览/下载：136/0  |  提交时间：2017/08/17
Fe-based Amorphous Coatings  Sealing Method  Aluminum Phosphate  Electrochemical Impedance Spectroscopy  Ultrasonic Excitation  Corrosion Resistance