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Effect of modulation period on structure and mechanical properties of WB2/a-WBC films deposited by direct-current magnetron sputtering 期刊论文
THIN SOLID FILMS, 2021, 卷号: 739, 页码: 9
Authors:  Liu, Yanming;  Zhao, Xingxing;  Tian, Li;  Wang, Chen;  Pei, Zhiliang
Favorite  |  View/Download：143/0  |  Submit date：2022/01/27
Magnetron sputtering  Tungsten boride  Amorphous tungsten borocarbide  Multilayer films  Modulation period  Tribo-mechanical properties