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2014 [1]
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中文 [1]
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真空科学与技术学报 [1]
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脉冲偏压对离子束辅助电弧离子镀TiN/Cu纳米复合膜结构及硬度的影响
期刊论文
真空科学与技术学报, 2014, 期号: 10, 页码: 1040-1046
Authors:
李凤岐
;
冯丹
;
赵彦辉
;
于宝海
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Submit date：2015/01/15
Tin/cu纳米复合膜
离子束辅助沉积
电弧离子镀
脉冲偏压
硬度
