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Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets
Li, Yueming1,2,3; Zhao, Guorui4; Qi, Hong3; Li, Meishuan3; Zheng, Yufeng1; Qian, Yuhai3; Sheng, Liyuan2
Corresponding AuthorQian, Yuhai(yhqian@imr.ac.cn) ; Sheng, Liyuan(lysheng@yeah.net)
2018-10-01
Source PublicationCERAMICS INTERNATIONAL
ISSN0272-8842
Volume44Issue:14Pages:17530-17534
AbstractIn the present research, single-phase Ti2AlN coatings were prepared on polycrystalline Al2O3 from cost-efficient hot-pressed Ti-Al-N targets by D.C. magnetron sputtering and subsequent annealing treatment. SEM, TEM and XRD analyses were performed to characterize the microstructure and phase constituents of the Ti-Al-N target and coating. The results reveal that phase constituents of hot-pressed Ti-Al-N targets were affected by the synthesis temperature. When the synthesis temperature was 700 degrees C, the target mainly comprised alpha-Ti, TiN and Ti-Al intermetallics. While in the target synthesized at 900 degrees C, TiN, Ti-Al intermetallics and Ti2AlN were the main phase constituents. The as-deposited coatings from both targets exhibited typical amorphous crystal structure. Crystallization of the coating initiated between 500 degrees C and 600 degrees C. After annealing at 700 degrees C for 1 h, the amorphous coating was transformed to single-phase polycrystalline Ti2AlN coating. In general, single-phase Ti2AlN coatings could be obtained from the target whether with Ti2AlN or not. It was the element ratio of Ti:Al:N = 2:1:1 (at%) rather than the phase contents in the targets that was critical to fabricate single-phase Ti(2)AIN coating.
KeywordCost-efficient target Ti(2)AIN coating Magnetron sputtering Annealing Crystallization
Funding OrganizationShenzhen Technology Innovation Project ; Shenzhen Basic Research Project ; National Natural Science Foundation of China
DOI10.1016/j.ceramint.2018.06.055
Indexed BySCI
Language英语
Funding ProjectShenzhen Technology Innovation Project[JSGG201704121 45203293] ; Shenzhen Basic Research Project[JCYJ20170815153143221] ; Shenzhen Basic Research Project[JCYJ20160427170611414] ; National Natural Science Foundation of China[51571205] ; National Natural Science Foundation of China[51401209] ; National Natural Science Foundation of China[51271191]
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Ceramics
WOS IDWOS:000442714100180
PublisherELSEVIER SCI LTD
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/129318
Collection中国科学院金属研究所
Corresponding AuthorQian, Yuhai; Sheng, Liyuan
Affiliation1.Peking Univ, Beijing 100871, Peoples R China
2.Peking Univ, Shenzhen Inst, Shenzhen 518057, Peoples R China
3.Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
4.Guangdong Inst New Mat, Natl Engn Lab Modern Mat Surface Engn Technol, Guangzhou 510651, Guangdong, Peoples R China
Recommended Citation
GB/T 7714
Li, Yueming,Zhao, Guorui,Qi, Hong,et al. Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets[J]. CERAMICS INTERNATIONAL,2018,44(14):17530-17534.
APA Li, Yueming.,Zhao, Guorui.,Qi, Hong.,Li, Meishuan.,Zheng, Yufeng.,...&Sheng, Liyuan.(2018).Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets.CERAMICS INTERNATIONAL,44(14),17530-17534.
MLA Li, Yueming,et al."Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets".CERAMICS INTERNATIONAL 44.14(2018):17530-17534.
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