Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition

doi:10.1007/s10854-022-08152-6

IMR OpenIR

	Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition
	Liu, Zitong 1,3; Shen, Longhai 2; Chen, Jianjin 2; Zhang, Xinglai 3
通讯作者	Shen, Longhai(shenlonghai@163.com) ; Zhang, Xinglai(zhangxl@imr.ac.cn)
	2022-04-08
发表期刊	JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
ISSN	0957-4522
页码	9
摘要	AlGaN ternary alloy nanostructures have emerged as an important building block for optoelectronic devices and exhibit broad application prospects. However, the fabrication of AlGaN nanostructures with high quality, especially high Al composition, by chemical vapor deposition (CVD) is limited by their phase separation. Here, AlGaN ternary alloy nanostructures with Al/Ga atomic ratio more than 90% are synthesized by using CVD method. The AlGaN nanocones and nanorods are obtained by adjusting the Ar/NH3 flow ratio at the same temperature. Furthermore, it is found that the increase of Ar flux is more favorable to the transport of Ga source, which leads to the raise of Ga content in AlGaN nanostructures. On the other hand, the decrease of NH3 flow is conducive to the formation of nanorods. Moreover, the pre-deposited Al powder on Si substrate provides Al-rich growth conditions and nucleation sites for AlGaN nanostructures, which becomes the key to the formation of AlGaN nanostructures with high Al composition. Based on the evolution of morphology, the growth process of AlGaN nanostructures is investigated by a self-catalytic vapor-solid mechanism.
资助者	Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Open Project of State Key Laboratory of Superhard Materials, Jilin University
DOI	10.1007/s10854-022-08152-6
收录类别	SCI
语种	英语
资助项目	Youth Innovation Promotion Association of the Chinese Academy of Sciences[2019197] ; Open Project of State Key Laboratory of Superhard Materials, Jilin University[202004]
WOS研究方向	Engineering ; Materials Science ; Physics
WOS类目	Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000781264400004
出版者	SPRINGER
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/172852
专题	中国科学院金属研究所
通讯作者	Shen, Longhai; Zhang, Xinglai
作者单位	1.Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China 2.Shenyang Ligong Univ, Sch Sci, Shenyang 110159, Peoples R China 3.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Liu, Zitong,Shen, Longhai,Chen, Jianjin,et al. Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2022:9.
APA	Liu, Zitong,Shen, Longhai,Chen, Jianjin,&Zhang, Xinglai.(2022).Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,9.
MLA	Liu, Zitong,et al."Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition".JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS (2022):9.