Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing

IMR OpenIR

	Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing
	Li, Yueming; Qian, Yuhai; Zhao, Guorui; Xu, Jingjun; Li, Meishuan; Li, MS (reprint author), 72 Wenhua Rd, Shenyang 110016, Peoples R China.
	2017-06-01
发表期刊	CERAMICS INTERNATIONAL
ISSN	0272-8842
卷号	43 期号:8 页码:6622-6625
摘要	An Nb2AlC coating was deposited on polycrystalline Al2O5 by a two-step method. Firstly, an amorphous Nb-Al-C coating was deposited by DC magnetron sputtering at room temperature from an Nb2AlC compound target, and then a crystalline Nb2AlC coating was obtained by subsequent annealing at 800 degrees C in Ar. The formation temperature of crystalline Nb2AlC in sputtering deposition was much lower than in hot pressing. The polycrystalline coating exhibited nano-size grains with arbitrary orientation. XRD, Raman spectroscopy, SEM and TEM were used to characterize the components and microstructures of the coatings.; An Nb2AlC coating was deposited on polycrystalline Al2O5 by a two-step method. Firstly, an amorphous Nb-Al-C coating was deposited by DC magnetron sputtering at room temperature from an Nb2AlC compound target, and then a crystalline Nb2AlC coating was obtained by subsequent annealing at 800 degrees C in Ar. The formation temperature of crystalline Nb2AlC in sputtering deposition was much lower than in hot pressing. The polycrystalline coating exhibited nano-size grains with arbitrary orientation. XRD, Raman spectroscopy, SEM and TEM were used to characterize the components and microstructures of the coatings.
部门归属	[li, yueming ; qian, yuhai ; zhao, guorui ; xu, jingjun ; li, meishuan] chinese acad sci, inst met res, shenyang natl lab mat sci, shenyang 110016, peoples r china ; [li, yueming ; zhao, guorui] univ chinese acad sci, beijing 100039, peoples r china
关键词	Nb2alc Magnetron Sputtering Two-step Method Annealing
学科领域	Materials Science, Ceramics
资助者	National Natural Science Foundation of China [51271191, 51571205, 51401209]
收录类别	SCI
语种	英语
WOS记录号	WOS:000401401500109
引用统计	被引频次：8[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/78107
专题	中国科学院金属研究所
通讯作者	Li, MS (reprint author), 72 Wenhua Rd, Shenyang 110016, Peoples R China.
推荐引用方式 GB/T 7714	Li, Yueming,Qian, Yuhai,Zhao, Guorui,et al. Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing[J]. CERAMICS INTERNATIONAL,2017,43(8):6622-6625.
APA	Li, Yueming,Qian, Yuhai,Zhao, Guorui,Xu, Jingjun,Li, Meishuan,&Li, MS .(2017).Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing.CERAMICS INTERNATIONAL,43(8),6622-6625.
MLA	Li, Yueming,et al."Preparation of Nb2AlC coating by DC magnetron sputtering and subsequent annealing".CERAMICS INTERNATIONAL 43.8(2017):6622-6625.