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Unveiling high-temperature stability and growth dynamics of CVD-SiOC coatings across different deposition conditions and environments 期刊论文
Materials Research Express, 2024, 卷号: 11, 期号: 10
作者:  Jing,Weichen;  Tariq,Naeem ul Haq;  Hou,Wenkang;  Xiong,Tianying;  Tang,Mingqiang
收藏  |  浏览/下载：3/0  |  提交时间：2025/04/27
SiOC coating  CVD  high-temperature stability  high-temperature growth dynamics  
Development of low-stress SiC coating on single crystal Si using low elastic modulus SiOC amorphous buffer layer 期刊论文
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2024, 卷号: 631, 页码: 8
作者:  Jing, Weichen;  Tariq, Naeem ul Haq;  Wang, Junchao;  Hou, Wenkang;  Xiong, Tianying;  Tang, Mingqiang
收藏  |  浏览/下载：3/0  |  提交时间：2025/04/27
SiC coating  SiOC buffer layer  MOCVD  Residual stress  Mechanical property  
Development of hydrogen-free fully amorphous silicon oxycarbide coating by thermal organometallic chemical vapor deposition technique 期刊论文
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2022, 卷号: 575, 页码: 8
作者:  Liu, Housheng;  Tariq, Naeem ul Haq;  Han, Rifei;  Liu, Hanhui;  Cui, Xinyu;  Tang, Mingqiang;  Xiong, Tianying
收藏  |  浏览/下载：111/0  |  提交时间：2021/12/09
Chemical vapor deposition  Amorphous SiOC coating  Amorphous carbon