Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor

doi:10.1109/TMAG.2022.3144488

IMR OpenIR

	Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor
	Gao, Li-Yin 1,2; Liu, Zhi-Quan 1,2,3
通讯作者	Liu, Zhi-Quan(lygaolls@alum.imr.ac.cn)
	2022-04-01
发表期刊	IEEE TRANSACTIONS ON MAGNETICS
ISSN	0018-9464
卷号	58 期号:4 页码:7
摘要	Due to outstanding magnetic properties, low cost, and high efficiency, electroplated Fe-Ni films were the most common magnetic core materials for inductors. In order to meet the requirement of a high-frequency on-chip microinductor in advanced 3-D electronic packaging, the properties of Fe-Ni films electroplated by a modified Watt type electrolyte with different concentrations of FeSO4 center dot 7H(2)O were investigated. Key magnetic properties, including saturated magnetic induction (B-s), coercivity (H-c), and resistivity (rho) were measured, which were 0.98-1.62 T, 0.6-5.6 Oe, and 17.2-33.4 mu Omega.cm, respectively. Both B-s and rho increased monotonically when the content of Fe within the films increased, which was similar to the bulk state Fe-Ni alloys. The H-c first decreased from 5.6 to 0.6 Oe, then fluctuated at the range of 0.6-2.2 Oe when the Fe content increased. As revealed in transmission electron microscopy (TEM) observation, the Fe-Ni films with face-centered cubic (fcc) structure are consist of nanograins with an average grain size of 5-10 nm, resulting in an ultralow H-c. The electroplated nanocrystalline Fe-Ni film (Fe 45 wt%) was further used as magnetic core materials due to its high B-s and rho value. In addition, it was proven that the as-fabricated Fe-Ni microinductor possessed a high inductance of 75 nH and a quality factor of 5 at 30 MHz, respectively. In summary, through composition and microstructure optimization of Fe-Ni films, the quality and working frequency of the microinductor were both improved.
关键词	Fe-Ni magnetic core magnetic properties nanocrystalline on-chip microinductor
资助者	Guangdong Shenzhen Joint Fund Youth Project ; Shenzhen Institute of Advanced Technology (SIAT) Innovation Program for Excellent Young Researchers
DOI	10.1109/TMAG.2022.3144488
收录类别	SCI
语种	英语
资助项目	Guangdong Shenzhen Joint Fund Youth Project[2019A1515110771] ; Shenzhen Institute of Advanced Technology (SIAT) Innovation Program for Excellent Young Researchers
WOS研究方向	Engineering ; Physics
WOS类目	Engineering, Electrical & Electronic ; Physics, Applied
WOS记录号	WOS:000792917600021
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/174087
专题	中国科学院金属研究所
通讯作者	Liu, Zhi-Quan
作者单位	1.Chinese Acad Sci, IShenzhen Inst Adv Elect Mat, Shenzhen Inst Adv Technol, Shenzhen 518055, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China 3.Univ Chinese Acad Sci, Shenzhen Coll Adv Technol, Shenzhen 518055, Peoples R China
推荐引用方式 GB/T 7714	Gao, Li-Yin,Liu, Zhi-Quan. Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor[J]. IEEE TRANSACTIONS ON MAGNETICS,2022,58(4):7.
APA	Gao, Li-Yin,&Liu, Zhi-Quan.(2022).Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor.IEEE TRANSACTIONS ON MAGNETICS,58(4),7.
MLA	Gao, Li-Yin,et al."Electroplating Low Coercivity Nanocrystalline Fe-Ni Magnetic Cores for High Performance On-Chip Microinductor".IEEE TRANSACTIONS ON MAGNETICS 58.4(2022):7.