Study on the perfection of in situ P-injection synthesis LEC-InP single crystals

doi:10.1016/j.jcrysgro.2003.12.042

IMR OpenIR

	Study on the perfection of in situ P-injection synthesis LEC-InP single crystals
	Zhou, XL ; Zhao, YW ; Sun, NF ; Yang, GY ; Xu, YQ ; Sun, TN
通讯作者	Zhou, XL(tnsun@heinfo.net)
	2004-03-15
发表期刊	JOURNAL OF CRYSTAL GROWTH
ISSN	0022-0248
卷号	264 期号:1-3 页码:17-20
摘要	Undoped, S-doped and Fe-doped InP crystals with diameter up to 4-inch have been pulled in drop 10 0 drop -direction under P-rich condition by a rapid P-injection in situ synthesis liquid encapsulated Czochralski (LEC) method. High speed photoluminescence mapping, etch-pit density (EPD) mapping and scanning electron microscopy have been used to characterize the samples of the single crystal ingots. Dislocations and electrical homogeneity of these samples are investigated and compared. By controlling the thermal field and the solid-liquid interface shape, 4-inch low-EPD InP single crystals have been successfully grown by the rapid P-injection synthesis LEC method. The EPD across the wafer of the ingots is less than 5 x 10(4) cm(-2). Cluster defects with a pore center are observed in the P-rich LEC grown InP ingots. These defects are distributed irregularly on a wafer and are surrounded by a high concentration of dislocations. The uniformity of the PL intensity across the wafer is influenced by these defects. (C) 2004 Elsevier B.V. All rights reserved.
关键词	etch-pit density phosphorus-rich PL-mapping indium phosphide
DOI	10.1016/j.jcrysgro.2003.12.042
收录类别	SCI
语种	英语
WOS研究方向	Crystallography ; Materials Science ; Physics
WOS类目	Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号	WOS:000220345400004
出版者	ELSEVIER SCIENCE BV
引用统计	被引频次：13[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/81493
专题	中国科学院金属研究所
通讯作者	Zhou, XL
作者单位	1.Hebei Semicond Res Inst, Hebei 050051, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Zhou, XL,Zhao, YW,Sun, NF,et al. Study on the perfection of in situ P-injection synthesis LEC-InP single crystals[J]. JOURNAL OF CRYSTAL GROWTH,2004,264(1-3):17-20.
APA	Zhou, XL,Zhao, YW,Sun, NF,Yang, GY,Xu, YQ,&Sun, TN.(2004).Study on the perfection of in situ P-injection synthesis LEC-InP single crystals.JOURNAL OF CRYSTAL GROWTH,264(1-3),17-20.
MLA	Zhou, XL,et al."Study on the perfection of in situ P-injection synthesis LEC-InP single crystals".JOURNAL OF CRYSTAL GROWTH 264.1-3(2004):17-20.