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MgO SECONDARY ELECTRON EMISSION FILM PREPARED BY RADIO-FREQUENCY REACTIVE SPUTERRING 期刊论文
ACTA METALLURGICA SINICA, 2016, 卷号: 52, 期号: 1, 页码: 10-16
作者:  Wang Bin;  Xong Liangyin;  Liu Shi
收藏  |  浏览/下载:103/0  |  提交时间:2021/02/02
radio-frequency reactive sputtering  thickness of film  surface roughness  secondary electron emission coefficient  resistance to electron beam bombardment  
MgO SECONDARY ELECTRON EMISSION FILM PREPARED BY RADIO-FREQUENCY REACTIVE SPUTERRING 期刊论文
ACTA METALLURGICA SINICA, 2016, 卷号: 52, 期号: 1, 页码: 10-16
作者:  Wang Bin;  Xong Liangyin;  Liu Shi
收藏  |  浏览/下载:91/0  |  提交时间:2021/02/02
radio-frequency reactive sputtering  thickness of film  surface roughness  secondary electron emission coefficient  resistance to electron beam bombardment  
Comparative studies on damages to organic layer during the deposition of ITO films by various sputtering methods 期刊论文
Applied Surface Science, 2013, 卷号: 285, 页码: 389-394
作者:  H. Lei;  M. H. Wang;  Y. Hoshi;  T. Uchida;  S. Kobayashi;  Y. Sawada
收藏  |  浏览/下载:135/0  |  提交时间:2013/12/24
Damage To Organic Layer  Magnetron Sputtering (Ms)  Low Voltage  Sputtering (Lvs)  Kinetic-energy-control-deposition (Kecd)  Facing  Target Sputtering (Fts)  Pl Spectra  Thin-films  Tris-(8-hydroxyquinoline) Aluminum  Bombardment  
Deposition, structure and hardness of Ti-Cu-N hard films prepared by pulse biased arc ion plating 期刊论文
Vacuum, 2011, 卷号: 86, 期号: 4, 页码: 415-421
作者:  X. Q. Wang;  Y. H. Zhao;  B. H. Yu;  J. Q. Xiao;  F. Q. Li
Adobe PDF(1001Kb)  |  收藏  |  浏览/下载:116/0  |  提交时间:2012/04/13
Ti-cu-n Hard Composite Films  Pulse Biased Arc Ion Plating  Composition  Structure  Superhard Nanocomposite Coatings  Mechanical-properties  Zr  Bombardment  Design  Energy  Ptsi  Dc  
Ti-Cu-N hard nanocomposite films prepared by pulse biased arc ion plating 期刊论文
Applied Surface Science, 2011, 卷号: 258, 期号: 1, 页码: 370-376
作者:  Y. H. Zhao;  X. Q. Wang;  J. Q. Xiao;  B. H. Yu;  F. Q. Li
Adobe PDF(821Kb)  |  收藏  |  浏览/下载:99/0  |  提交时间:2012/04/13
Pulse Biased Arc Ion Plating  Nanocomposite Films  Ti-cu-n  Hardness  Mechanical-properties  Superhard Materials  Coatings  Deposition  Dc  Microstructure  Bombardment  Morphology  Titanium  Design  
Influence of N-2 gas pressure and negative bias voltage on the microstructure and properties of Cr-Si-N films by a hybrid coating system 期刊论文
Journal of Vacuum Science & Technology A, 2008, 卷号: 26, 期号: 5, 页码: 1188-1194
作者:  Q. M. Wang;  I. W. Park;  K. Kim
收藏  |  浏览/下载:83/0  |  提交时间:2012/04/13
Cathodic Arc Plasma  Mechanical-properties  Sputtering Techniques  Substrate Bias  Nanocomposite Films  Ion-bombardment  Thin-films  Deposition  Temperature  Hardness  
Isotopic mass effects for low-energy ion channeling in single-wall carbon nanotubes 期刊论文
Journal of Physical Chemistry C, 2008, 卷号: 112, 期号: 39, 页码: 15204-15206
作者:  L. P. Zheng;  Z. Y. Zhu;  Y. Li;  D. Z. Zhu;  H. H. Xia
Adobe PDF(119Kb)  |  收藏  |  浏览/下载:82/0  |  提交时间:2012/04/13
Charged Particles  Heavy-ions  Simulation  Mo-92-mo-100  Bombardment  Dependence  Radiation  Crystal  Targets  Cascade  
Internal stress and adhesion of Cu film/Si prepared by both MEVVA and IBAD 期刊论文
Surface & Coatings Technology, 2006, 卷号: 201, 期号: 3-4, 页码: 1243-1249
作者:  M. Yu;  J. Z. Zhang;  D. X. Li;  Q. L. Meng;  W. Z. Li
收藏  |  浏览/下载:111/0  |  提交时间:2012/04/14
Mevva  Ibad  Copper Film  Compressive Stress  Adhesion  Deposited Thin-films  Intrinsic Stress  Residual-stress  Cosi2 Films  Bombardment  Diamond  
Preparation of TiN films by arc ion plating using dc and pulsed biases 期刊论文
Journal of Vacuum Science & Technology A, 2004, 卷号: 22, 期号: 2, 页码: 250-254
作者:  M. D. Huang;  Y. P. Lee;  C. Dong;  G. Q. Lin;  C. Sun;  L. S. Wen
收藏  |  浏览/下载:84/0  |  提交时间:2012/04/14
Plated Tin  Deposition  Coatings  Voltage  Temperatures  Bombardment  Evaporation  Hard  
Analysis of the contributions of PKA and SKA to the isotope enrichment 期刊论文
Acta Physica Sinica, 2004, 卷号: 53, 期号: 5, 页码: 1577-1582
作者:  L. P. Zheng;  H. Y. Zhang;  T. T. Wang;  Y. G. Ma
收藏  |  浏览/下载:81/0  |  提交时间:2012/04/14
Sputtering  Isotope Enrichment  Momentum Asymmetry  Molecular-dynamics Simulation  Monte-carlo-simulation  Angular-distribution  Ion-bombardment  Zero-fluence  Fractionation  Energy  Mo-92-mo-100  Momentum  Cu-63-cu-65