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Influence of phosphine flow rate on Si growth rate in gas source molecular beam epitaxy 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2000, 卷号: 220, 期号: 4, 页码: 461-465
作者:  Gao, F;  Huang, DD;  Li, JP;  Lin, YX;  Kong, MY;  Sun, DZ;  Li, JM;  Lin, LY
收藏  |  浏览/下载:74/0  |  提交时间:2021/02/02
Si growth rate  P doping  PH3 flow rate  P segregation  GSMBE  
The growth of Si/SiGe/Si structures for heterojunction bipolar transistor by gas source molecular beam epitaxy 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2000, 卷号: 220, 期号: 4, 页码: 457-460
作者:  Gao, F;  Huang, DD;  Li, JP;  Lin, YX;  Kong, MY;  Li, JM;  Zeng, YP;  Lin, LY
收藏  |  浏览/下载:88/0  |  提交时间:2021/02/02
GSMBE  SiGe alloy  doping  SIMS  HBT  current gain  
Influence of phosphine flow rate on Si growth rate in gas source molecular beam epitaxy 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2000, 卷号: 220, 期号: 4, 页码: 461-465
作者:  Gao, F;  Huang, DD;  Li, JP;  Lin, YX;  Kong, MY;  Sun, DZ;  Li, JM;  Lin, LY
收藏  |  浏览/下载:67/0  |  提交时间:2021/02/02
Si growth rate  P doping  PH3 flow rate  P segregation  GSMBE  
The growth of Si/SiGe/Si structures for heterojunction bipolar transistor by gas source molecular beam epitaxy 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2000, 卷号: 220, 期号: 4, 页码: 457-460
作者:  Gao, F;  Huang, DD;  Li, JP;  Lin, YX;  Kong, MY;  Li, JM;  Zeng, YP;  Lin, LY
收藏  |  浏览/下载:92/0  |  提交时间:2021/02/02
GSMBE  SiGe alloy  doping  SIMS  HBT  current gain  
The growth of Si/SiGe/Si structures for heterojunction bipolar transistor by gas source molecular beam epitaxy 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2000, 卷号: 220, 期号: 4, 页码: 457-460
作者:  Gao, F;  Huang, DD;  Li, JP;  Lin, YX;  Kong, MY;  Li, JM;  Zeng, YP;  Lin, LY
收藏  |  浏览/下载:78/0  |  提交时间:2021/02/02
GSMBE  SiGe alloy  doping  SIMS  HBT  current gain  
Doping during low-temperature growth of materials for n-p-n Si/SiGe/Si heterojuction bipolar transistor by gas source molecular beam epitaxy 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2000, 卷号: 208, 期号: 1-4, 页码: 322-326
作者:  Liu, JP;  Huang, DD;  Li, JP;  Lin, YX;  Sun, DZ;  Kong, MY
收藏  |  浏览/下载:104/0  |  提交时间:2021/02/02
n-type doping  p-type doping  Si/SiGe  HBT  GSMBE