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中国科学院金属研究所机构知识库
Knowledge Management System Of Institute of metal research，CAS
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真空 [1]
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中频孪生靶非平衡磁控溅射纳米硅薄膜的研究
学位论文
, 北京: 中国科学院金属研究所, 2012
Authors:
高俊华
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View/Download：154/0
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Submit date：2013/04/12
中频孪生靶
非平衡磁控溅射
纳米硅薄膜
磁镜场
Middle Frequency Dual-target
Unbalanced Magnetron Sputtering
Nc-si Film
Magnetic Mirror Field
一种微晶硅薄膜的沉积方法
专利
专利类型: 发明专利, 申请日期: 2011-12-28, 公开日期: 2011-12-28
Authors:
肖金泉, 赵彦辉, 崔连武, 华伟刚, 宫骏, 孙超 and 黄荣芳
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View/Download：241/0
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Submit date：2013/06/06
准分子激光引起的非晶硅薄膜晶化行为的研究
期刊论文
真空, 2009, 期号: 4, 页码: 5-8
Authors:
崔连武
;
程华
;
吴敢
;
黄荣芳
;
闻火
;
闻立时
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View/Download：152/0
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Submit date：2012/04/12
准分子激光
非晶硅薄膜
激光能量密度
结晶度
