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Hot filament chemical vapor deposition temperature field optimization for diamond films deposited on silicon nitride substrates 期刊论文
MATERIALS RESEARCH EXPRESS, 2021, 卷号: 8, 期号: 11, 页码: 15
Authors:  Wu, Yuhou;  Zhang, Huisen;  Yan, Guangyu;  Liu, Lusheng;  Cristea, Daniel;  Wang, He;  Yang, Yumiao;  Shen, Jianhui
Favorite  |  View/Download:17/0  |  Submit date:2021/12/09
HFCVD  diamond film  numerical simulation