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Hot filament chemical vapor deposition temperature field optimization for diamond films deposited on silicon nitride substrates
期刊论文
MATERIALS RESEARCH EXPRESS, 2021, 卷号: 8, 期号: 11, 页码: 15
Authors:
Wu, Yuhou
;
Zhang, Huisen
;
Yan, Guangyu
;
Liu, Lusheng
;
Cristea, Daniel
;
Wang, He
;
Yang, Yumiao
;
Shen, Jianhui
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Submit date：2021/12/09
HFCVD
diamond film
numerical simulation
