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Structural, electrical, and optical properties of transparent conductive oxide ZnO : Al films prepared by dc magnetron reactive sputtering 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 卷号: 19, 期号: 3, 页码: 963-970
作者:  Chen, M;  Pei, ZL;  Wang, X;  Sung, C;  Wen, LS
收藏  |  浏览/下载：77/0  |  提交时间：2021/02/02
Simulation of the influence of the filament arrangement on the gas phase during hot filament chemical vapor deposition of diamond films 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 卷号: 18, 期号: 3, 页码: 860-863
作者:  Song, GH;  Sun, C;  Huang, RF;  Wen, LS
收藏  |  浏览/下载：81/0  |  提交时间：2021/02/02
Simulation of the influence of the filament arrangement on the gas phase during hot filament chemical vapor deposition of diamond films 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 卷号: 18, 期号: 3, 页码: 860-863
作者:  Song, GH;  Sun, C;  Huang, RF;  Wen, LS
收藏  |  浏览/下载：85/0  |  提交时间：2021/02/02
Electric degradation behavior of hot filament in diamond chemical vapor deposition 期刊论文
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, 1999, 卷号: 17, 期号: 5, 页码: 3108-3110
作者:  G. C. Chen;  R. F. Huang;  L. S. Wen
收藏  |  浏览/下载：63/0  |  提交时间：2012/04/14
Growth  Mechanism  Hydrogen  C-13  Cvd  
Abnormal steady states in reactive sputtering 期刊论文
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, 1999, 卷号: 17, 期号: 1, 页码: 70-76
作者:  S. L. Zhu;  F. H. Wang;  W. T. Wu
收藏  |  浏览/下载：87/0  |  提交时间：2012/04/14
Titanium Nitride  Partial-pressure  Deposition  Films  
On the relation between preferential emission and bulk composition in binary alloy sputtering 期刊论文
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, 1997, 卷号: 15, 期号: 4, 页码: 2431-2433
作者:  L. P. Zheng;  R. S. Li;  S. Y. Li
收藏  |  浏览/下载：67/0  |  提交时间：2012/04/14
Surface-composition Changes  Ar ion-bombArdment  Gibbsian Segregation  Ni Alloys  Elements  Implantation  Temperature  Depth  
Direct observation of beta-TaH phase precipitation in tantalum-hydrogen solid solution 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 卷号: 14, 期号: 4, 页码: 2551-2553
作者:  Chen, CL;  Zhou, DS;  Mitchell, TE;  Ye, HQ
收藏  |  浏览/下载：80/0  |  提交时间：2021/02/02
A TRANSMISSION ELECTRON-MICROSCOPY STUDY ON TI-N FILMS DEPOSITED BY ION PLATING 期刊论文
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, 1986, 卷号: 4, 期号: 6, 页码: 2682-2685
作者:  L. S. Wen;  X. Jiang;  C. Y. Si
收藏  |  浏览/下载：54/0  |  提交时间：2012/04/14