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Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating 期刊论文
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2015, 卷号: 15, 期号: 9, 页码: 7357-7362
作者:  Lang, W. C.;  Gao, B.;  Du, H.;  Xiao, J. Q.;  Li, M. X.;  Wang, X. H.
收藏  |  浏览/下载:127/0  |  提交时间:2016/04/21
Arc Ion Plating  Transverse Magnetic Field (Tmf)  Pulsed Bias  Nitrogen Partial Pressure  Substrate Position  Macro-particles Reduction  
Study on nanocrystalline Cr2O3 films deposited by arc ion plating: I. composition, morphology, and microstructure analysis 期刊论文
Surface & Coatings Technology, 2012, 卷号: 206, 期号: 10, 页码: 2629-2637
作者:  T. G. Wang;  D. Jeong;  S. H. Kim;  Q. Wang;  D. W. Shin;  S. Melin;  S. Iyengar;  K. H. Kim
收藏  |  浏览/下载:188/0  |  提交时间:2013/02/05
Cr2o3 Film  Arc Ion Plating  Bias Voltage  Grain Size  Surface  Morphology  Hrtem  Chromium-oxide Coatings  Pulsed-laser Deposition  Negative Bias Voltage  Si-n Coatings  Thin-films  Mechanical-properties  Optical-properties  Nitrogen Pressure  Vapor-deposition  Residual-stress  
Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased Arc Ion Plating 期刊论文
Journal of Materials Science & Technology, 2009, 卷号: 25, 期号: 5, 页码: 681-686
作者:  Y. H. Zhao;  G. Q. Liu;  J. Q. Xiao;  C. Dong;  L. S. Wen
Adobe PDF(551Kb)  |  收藏  |  浏览/下载:89/0  |  提交时间:2012/04/13
Arc Ion Plating  Pulsed Bias  Tin Film  Droplet-particles  Plasma Sheath  Vacuum-arc  Macroparticles  Levitation  Substrate  Mechanism  Voltage  Dust  
Factors Affecting Microhardness of Ti/TiN Multilayer Films Deposited by Pulsed Bias Arc Ion Plating 期刊论文
Plasma Processes and Polymers, 2007, 卷号: 4, 页码: S120-S123
作者:  G. Q. Lin;  Y. H. Zhao;  C. A. Dong;  L. S. Wen
收藏  |  浏览/下载:83/0  |  提交时间:2012/04/13
Arc Ion Plating  Films  Hardness  Microhardness  Pulsed Bias  Ti/tin  Multilayer  
Effect of pulsed bias on microhardness of Ti/TiN multilayer films deposited by arc ion plating 期刊论文
ACTA METALLURGICA SINICA, 2005, 卷号: 41, 期号: 10, 页码: 1106-1110
作者:  Zhao, YH;  Lin, GQ;  Li, XN;  Dong, C;  Wen, LS
收藏  |  浏览/下载:93/0  |  提交时间:2021/02/02
pulsed bias  arc ion plating  Ti/TiN nano-multilayer film  microhardness  
Substrate temperature calculation for pulsed bias arc ion plating 期刊论文
Surface & Coatings Technology, 2005, 卷号: 194, 期号: 2-3, 页码: 325-329
作者:  G. Q. Lin;  X. Bai;  C. Dong;  W. Lishi;  L. H. Wen
收藏  |  浏览/下载:81/0  |  提交时间:2012/04/14
Substrate Temperature  Arc Ion Plating  Pulsed Bias  Tin  Deposition  Voltage  
Experimental verification of the physical model for droplet-particles cleaning in pulsed bias arc ion plating 期刊论文
Journal of Materials Science & Technology, 2005, 卷号: 21, 期号: 3, 页码: 423-426
作者:  Y. H. Zhao;  G. Q. Lin;  C. Dong;  L. S. Wen
收藏  |  浏览/下载:141/0  |  提交时间:2012/04/14
Arc Ion Plating  Pulsed Bias  Tin Film  Droplet-particles  Tin  Deposition  Mechanism  Coatings  Voltage  
Analysis and calculation of forces on macroparticles in plasma sheath 期刊论文
ACTA METALLURGICA SINICA, 2004, 卷号: 40, 期号: 10, 页码: 1064-1068
作者:  Guo, HM;  Lin, GQ;  Sheng, MY;  Wang, DZ;  Dong, C;  Wen, LS
收藏  |  浏览/下载:81/0  |  提交时间:2021/02/02
macroparticle  arc ion plating  pulsed bias  plasma sheath  force analysis  
Calculation on deposited temperature during pulsed bias arc ion plating 期刊论文
ACTA METALLURGICA SINICA, 2004, 卷号: 40, 期号: 10, 页码: 1069-1073
作者:  Bai, X;  Lin, GQ;  Dong, C;  Wen, LS
收藏  |  浏览/下载:95/0  |  提交时间:2021/02/02
arc ion plating  pulsed bias  deposited temperature  calculation  
Mechanical property of low temperature deposited TiN film by pulsed biased arc ion plating 期刊论文
ACTA METALLURGICA SINICA, 2003, 卷号: 39, 期号: 5, 页码: 516-520
作者:  Huang, MD;  Sun, C;  Lin, GQ;  Dong, C;  Wen, LS
收藏  |  浏览/下载:91/0  |  提交时间:2021/02/02
arc ion plating  low temperature deposition  pulsed bias  TiN film